Bulk acoustic wave resonator on a stress isolated platform
US10651817B2 · kind B2 · utility
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Key dates
| Filing date | Dec 29, 2017 |
| Grant date | May 12, 2020 |
| Priority date | — |
| Expiry date | Jan 25, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/0248
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
In described examples of a micromechanical system (MEMS), a rigid cantilevered platform is formed on a base substrate. The cantilevered platform is anchored to the base substrate by only a single anchor point. A MEMS resonator is formed on the cantilevered platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.