Systems and methods for in situ high temperature X-ray spectroscopy in electron microscopes
US10656106B2 · kind B2 · utility
0Cited by
2References
20Claims
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Key dates
| Filing date | Feb 5, 2019 |
| Grant date | May 19, 2020 |
| Priority date | — |
| Expiry date | Feb 5, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2807
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In some embodiments, a system for collecting information from a sample includes a sample stage and one or more signal detectors. The sample stage includes a heating element, and the heating element is capable of heating at least a portion of the sample stage to at least 100 Celsius. The one or more signal detectors has a detection material with a silicon nitride window positioned between the detection material and the sample stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.