Reticle transportation container
US10658215B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2017 |
| Grant date | May 19, 2020 |
| Priority date | — |
| Expiry date | Oct 30, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67724
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transportation container is provided with a container body constructed of a top wall, a bottom wall, a rear wall, and two sidewalls forming a front opening for loading or unloading a reticle pod into or out of the container body; a lid for opening and closing the front opening; and a lift plate above the container body configured to connect to a carrier of an overhead hoist transfer (OHT) system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.