Electromechanical detection device, particularly for gravimetric detection, and method for manufacturing the device
US10670507B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2014 |
| Grant date | Jun 2, 2020 |
| Priority date | — |
| Expiry date | Jun 28, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Electromechanical detection device, particularly for gravimetric detection, and method for manufacturing the device. The electromechanical detection device includes a support including a face defining a plane, at least one beam that can move relative to the support, and means of detecting beam displacement, outputting a signal that depends on the displacement. The beam is anchored to the support through an end and is approximately perpendicular to the plane, and the other end of the beam includes at least one reception zone that can receive one or several particles causing or modifying displacement of the beam, in order to determine at least one physical property of the particle(s) from the signal. According to the invention, the detection means are located between the reception zone and the support.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.