Patent · US Active

Control device

US10678151B2 · kind B2 · utility

2Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Holz · Aalen, DE
Jan Horn · Munich, DE
Klaus Syrowatka · Ellwangen, DE

Key dates

Filing date	Feb 25, 2019
Grant date	Jun 9, 2020
Priority date	—
Expiry date	Feb 25, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70508
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A control device for an assembly having a plurality of sensors and/or actuators includes at least one first control unit which is designed to be vacuum-suitable, has a distributor for splitting and/or combining signals and has a converter for converting digital signals into analog signals and/or analog signals into digital signals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.