Quantum device comprising FET transistors and qubits co-integrated on the same substrate
US10679139B2 · kind B2 · utility
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14Claims
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Key dates
| Filing date | Feb 25, 2019 |
| Grant date | Jun 9, 2020 |
| Priority date | — |
| Expiry date | Feb 25, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D48/383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Quantum device comprising: and wherein a width of the first lateral spacers is greater than that of the second lateral spacers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.