Methods, systems, and apparatus for mass flow verification based on choked flow
US10684159B2 · kind B2 · utility
1Cited by
10References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2016 |
| Grant date | Jun 16, 2020 |
| Priority date | — |
| Expiry date | Oct 26, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/86
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Mass flow verification systems and apparatus may verify mass flow rates of mass flow controllers (MFCs) based on choked flow principles. These systems and apparatus may include a plurality of differently-sized flow restrictors coupled in parallel. A wide range of flow rates may be verified via selection of a flow path through one of the flow restrictors based on an MFC's set point. Mass flow rates may be determined via pressure and temperature measurements upstream of the flow restrictors under choked flow conditions. Methods of verifying a mass flow rate based on choked flow principles are also provided, as are other aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.