Patent · US Active

Acoustic wave sensor

US10684163B2 · kind B2 · utility

0Cited by

11References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Alfons Dehe · Reutlingen, DE
Manuel Dorfmeister · Wien, AT
Ulrich Schmid · Wien, AT
Michael Schneider · Wien, AT

Key dates

Filing date	Aug 17, 2017
Grant date	Jun 16, 2020
Priority date	—
Expiry date	Jan 3, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH10N30/506
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.