Patent · US Active

Imaging a gap between sample and probe of a scanning probe microscope in a substantially horizontal side view

US10684307B2 · kind B2 · utility

0Cited by

10References

11Claims

0Family size

Assignee

Anton Paar GmbH · AT

Inventors

Daniel Koller · Graz, AT
Alberto Gomez-Casado · Graz, AT
Markus Brandner · Graz, AT

Key dates

Filing date	Nov 20, 2017
Grant date	Jun 16, 2020
Priority date	—
Expiry date	Jan 8, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01Q30/02
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A scanning probe microscope analyses a sample by moving a probe and the sample relative to one another. The scanning probe microscope includes a detection unit for detecting an image of a gap between the sample and the probe in a substantially horizontal side view.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.