Patent · US Active

Finger metal-oxide-metal (FMOM) capacitor

US10686031B2 · kind B2 · utility

0Cited by

8References

11Claims

0Family size

Assignee

QUALCOMM Incorporated · US

Inventors

Peijie Feng · San Diego, US
Junjing Bao · Fishkill, US
Ye Lu · San Diego, US
Giridhar Nallapati · San Diego, US

Key dates

Filing date	Mar 27, 2018
Grant date	Jun 16, 2020
Priority date	—
Expiry date	Mar 27, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/76879
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A capacitor includes first conductive fingers interdigitated with second conductive fingers at an Mx interconnect level, and third conductive fingers interdigitated with fourth conductive fingers at an Mx-1 interconnect level. The third conductive fingers are offset from the first conductive fingers. The second conductive fingers are offset from the fourth conductive fingers. The capacitor further includes fifth conductive fingers interdigitated with sixth conductive fingers at an Mx-2 interconnect level. The fifth conductive fingers are offset from the third conductive fingers. The sixth conductive fingers are offset from the fourth conductive fingers. The capacitor further includes seventh conductive fingers interdigitated with eighth conductive fingers at an Mx-3 interconnect level. The seventh conductive fingers are offset from the fifth conductive fingers. The eighth conductive fingers are offset from the sixth conductive fingers. A first set of vias electrically couples the first conductive fingers to the fifth conductive fingers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.