Probe systems and methods that utilize a flow-regulating structure for improved collection of an optical image of a device under test

US10698025B2 · kind B2 · utility

Assignee

• FormFactor Beaverton, Inc. · US

Inventors

• Michael Teich · Mannheim, DE
• Axel Becker · Altrip, DE

Key dates

• Filing date: Jun 19, 2019
• Grant date: Jun 30, 2020
• Expiry date: Jun 19, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2887
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Probe systems and methods for collecting an optical image of a device under test (DUT) are disclosed herein. The probe systems include a chuck, a chuck thermal module, an enclosure, an imaging device, and a flow-regulating structure. The chuck defines a support surface configured to support a substrate and the chuck thermal module is configured to regulate a temperature of the chuck. The enclosure defines an enclosed volume, which contains the support surface of the chuck, and an aperture. The imaging device is at least partially external the enclosed volume and the enclosure and the imaging device defines a gap therebetween. The gap at least partially defines a fluid conduit that permits fluid flow between the enclosed volume and an external region. The flow-regulating structure is configured to regulate fluid flow through the fluid conduit. The methods include methods of utilizing the systems.