Patent · US Active

Operating a particle beam apparatus

US10699869B2 · kind B2 · utility

2Cited by

3References

23Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Dirk Preikszas · Oberkochen, DE
Gero Walter · Lauchheim, DE

Key dates

Filing date	Feb 19, 2019
Grant date	Jun 30, 2020
Priority date	—
Expiry date	Feb 19, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/1501
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for operating a particle beam apparatus. An objective lens current may be swept, and a property of a deflection unit and/or of an aperture unit may be set while the objective lens current is swept. Setting the property may implemented in such a way that either an image of the object displayed on a display device does not move or any such movement of the displayed image has a minimal deflection. Moreover, the operating voltage of a beam generator may be swept and the object may be aligned by means of a specimen stage. While the operating voltage is swept, the specimen stage may be moved into an aligned position in such a way that either the image of the object displayed on the display device does not move or any such movement of the displayed image has a minimal deflection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.