Inspection apparatus and semiconductor structure-manufacturing apparatus including the same
US10699927B1 · kind B1 · utility
0Cited by
15References
20Claims
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Assignee
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Key dates
| Filing date | Jul 12, 2019 |
| Grant date | Jun 30, 2020 |
| Priority date | — |
| Expiry date | Jul 12, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus includes a first optical module including a first light source configured to emit first light to a semiconductor structure, a second light source configured to emit second light different from the first light to a portion adjacent to a portion to which the first light is emitted in the semiconductor structure, a detector configured to detect the second light reflected toward the second light source, and a lock-in amplifier connected to the first optical module and the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.