Gwangsik Park
6Patents
1h-index
16Co-inventors
37Inventor score
Filing activity: Dec 19, 2018 → Apr 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11726046B2 | Multi-scale spectral imaging apparatuses and methods, and methods of manufacturing semiconductor devices by using the imaging methods | Physics | 2 | Active |
| US10699927B1 | Inspection apparatus and semiconductor structure-manufacturing apparatus including the same | Physics | 0 | Active |
| US11264256B2 | Wafer inspection apparatus | Physics | 0 | Active |
| US12045009B2 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Physics | 0 | Active |
| US11898912B2 | Hyperspectral imaging (HSI) apparatus and inspection apparatus including the same | Physics | 0 | Active |
| US11314205B2 | Digital holography microscope (DHM), and inspection method and semiconductor manufacturing method using the DHM | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.