Method for creating a fully self-aligned via
US10699953B2 · kind B2 · utility
1Cited by
32References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2019 |
| Grant date | Jun 30, 2020 |
| Priority date | — |
| Expiry date | May 29, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76883
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Apparatuses and methods to provide a fully self-aligned via are described. Some embodiments of the disclosure provide an electronic device having a liner that is selectively removable when compared to conductive lines. The liner may be selectively removed by utilizing one or more of a base (e.g. sodium hydroxide) and hydrogen peroxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.