Scanning differential interference contrast in an imaging system design
US10705026B2 · kind B2 · utility
1Cited by
4References
20Claims
0Family size
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Key dates
| Filing date | Sep 26, 2019 |
| Grant date | Jul 7, 2020 |
| Priority date | — |
| Expiry date | Sep 26, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/283
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The inspection system includes an illumination source, a TDI-CCD sensor, and a dark field/bright field sensor. A polarizer receives the light from the light source. The light from the polarizer is directed at a Wollaston prism, such as through a half wave plate. Use of the TDI-CCD sensor and the dark field/bright field sensor provide high spatial resolution, high defect detection sensitivity and signal-to-noise ratio, and fast inspection speed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.