Flow rate control apparatus, flow rate control method, and program recording medium
US10705546B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2019 |
| Grant date | Jul 7, 2020 |
| Priority date | — |
| Expiry date | Jul 24, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0647
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
In order to provide a flow rate control apparatus capable of reducing noise while reducing delay, the flow rate control apparatus includes: a fluid resistor provided in a flow path; a downstream valve provided downstream of the fluid resistor; and a downstream pressure sensor provided between the fluid resistor and the downstream valve. The apparatus calculates a resistor flow rate through the fluid resistor; the time change amount of the downstream pressure; on the basis of the resistor flow rate, the difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculates a weighted average to estimate a valve flow rate through the downstream valve; and, on the basis of the deviation between a set flow rate and the valve flow rate, controls the downstream side valve, in which the weighting factor is configured to be changeable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.