HORIBA STEC, CO., LTD.
198Patents
195Active
198Granted
60Portfolio score
Filing activity: Feb 24, 2005 → Mar 20, 2024 · 18 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8356623B2 | Mass flow meter and mass flow controller | Emerging Cross-Sectional Technologies | 45 | Active |
| US7431045B2 | Flow restrictor | Emerging Cross-Sectional Technologies | 29 | Expired |
| US9223318B2 | Mass flow controller system | Emerging Cross-Sectional Technologies | 26 | Active |
| US7881829B2 | Mass flow controller | Emerging Cross-Sectional Technologies | 25 | Active |
| US8789556B2 | Flow rate control device, diagnostic device for use in flow rate measuring mechanism or for use in flow rate control device including the flow rate measuring mechanism and recording medium having diagnostic program recorded thereon for use in the same | Emerging Cross-Sectional Technologies | 24 | Active |
| US8851105B2 | Mass flow meter, mass flow controller, mass flow meter system and mass flow control system containing the mass flow meter and the mass flow controller | Emerging Cross-Sectional Technologies | 22 | Active |
| US8104323B2 | Flow controller, flow measuring device testing method, flow controller testing system, and semiconductor manufacturing apparatus | Physics | 22 | Active |
| US9081388B2 | Flow rate control device | Emerging Cross-Sectional Technologies | 22 | Active |
| US8744784B2 | Diagnostic mechanism in differential pressure type mass flow controller | Physics | 22 | Active |
| US8910656B2 | Fluid controller | Emerging Cross-Sectional Technologies | 21 | Active |
| US8443649B2 | Mass flow controller verifying system, verifying method and verifying program | Emerging Cross-Sectional Technologies | 21 | Active |
| US8800589B2 | Material gas concentration control system | Emerging Cross-Sectional Technologies | 21 | Active |
| US8746057B2 | Flow rate measuring device and flow rate controller | Emerging Cross-Sectional Technologies | 21 | Active |
| US8265795B2 | Mass flow controller | Emerging Cross-Sectional Technologies | 20 | Active |
| US8196609B2 | Integrated gas panel apparatus | Emerging Cross-Sectional Technologies | 19 | Active |
| US8019481B2 | Flow rate ratio control device | Emerging Cross-Sectional Technologies | 18 | Active |
| US8429979B2 | Capacitance type pressure sensor | Physics | 14 | Active |
| US8967200B2 | Fluid control valve | Emerging Cross-Sectional Technologies | 13 | Active |
| US8459290B2 | Material gas concentration control system | Emerging Cross-Sectional Technologies | 12 | Active |
| US9371930B2 | Fluid control valve | Mechanical Engineering; Lighting; Heating | 11 | Active |
| US9109736B2 | Fluid resistance device | Physics | 10 | Active |
| US9091380B2 | Fluid device | Emerging Cross-Sectional Technologies | 9 | Active |
| US8979137B2 | Coupling ring | Mechanical Engineering; Lighting; Heating | 9 | Active |
| US8844901B2 | Flow control valve | Emerging Cross-Sectional Technologies | 9 | Active |
| US9075414B2 | Pressure control device, flow rate control device and recording medium having programs used for pressure control device, recording medium having programs used for flow rate control device | Emerging Cross-Sectional Technologies | 8 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.