Metal protective layer for electron emitters with a diffusion barrier
US10714294B2 · kind B2 · utility
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3References
16Claims
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Assignee
Inventors
Key dates
| Filing date | May 22, 2019 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | May 22, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/06341
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An emitter with a diameter of 100 nm or less is used with a protective cap layer and a diffusion barrier between the emitter and the protective cap layer. The protective cap layer is disposed on the exterior surface of the emitter. The protective cap layer includes molybdenum or iridium. The emitter can generate an electron beam. The emitter can be pulsed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.