Zefram Marks
7Patents
1h-index
17Co-inventors
37Inventor score
Filing activity: Aug 21, 2018 → Jun 21, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11268911B2 | Boron-based capping layers for EUV optics | Electricity | 1 | Active |
| US10741354B1 | Photocathode emitter system that generates multiple electron beams | Electricity | 1 | Active |
| US11156926B2 | Vacuum actuator containment for molecular contaminant and particle mitigation | Physics | 0 | Active |
| US10840055B2 | System and method for photocathode illumination inspection | Electricity | 0 | Active |
| US11968772B2 | Optical etendue matching methods for extreme ultraviolet metrology | Electricity | 0 | Active |
| US10714294B2 | Metal protective layer for electron emitters with a diffusion barrier | Electricity | 0 | Active |
| US12360058B2 | Integration of an optical height sensor in mask inspection tools | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.