Sulfoxide/glycol ether based solvents for use in the electronics industry
US10731114B2 · kind B2 · utility
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4Claims
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Key dates
| Filing date | Jan 20, 2017 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Jan 20, 2037 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Solvents useful for removing, among other things, photoresists and poly(amic acid)/polyimide from display/semiconductor substrates or electronic processing equipment, consist essentially of:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.