Patent · US Active

Photocathode emitter system that generates multiple electron beams

US10741354B1 · kind B1 · utility

1Cited by

6References

18Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Gildardo Delgado · Livermore, US
Katerina Ioakeimidi · San Francisco, US
Rudy F. Garcia · Union City, US
Zefram Marks · Gilroy, US
Gary V. Lopez Lopez · Sunnyvale, US
Frances Hill · Sunnyvale, US
Michael E. Romero · San Jose, US

Key dates

Filing date	Aug 21, 2018
Grant date	Aug 11, 2020
Priority date	—
Expiry date	Sep 27, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2817
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The system includes a photocathode electron source, diffractive optical element, and a microlens array to focus the beamlets. A source directs a radiation beam to the diffractive optical element, which produces a beamlet array to be used in combination with a photocathode surface to generate an array of electron beams from the beamlets.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.