Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching
US10741363B1 · kind B1 · utility
16Cited by
11References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2019 |
| Grant date | Aug 11, 2020 |
| Priority date | — |
| Expiry date | Oct 8, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.