Method of manufacturing pellicle and apparatus for assembling pellicle
US10747104B2 · kind B2 · utility
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4References
14Claims
0Family size
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Key dates
| Filing date | Aug 30, 2017 |
| Grant date | Aug 18, 2020 |
| Priority date | — |
| Expiry date | May 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/64
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.