System and method for automating user interaction for semiconductor manufacturing equipment
US10747210B2 · kind B2 · utility
1Cited by
2References
33Claims
0Family size
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Key dates
| Filing date | Aug 31, 2018 |
| Grant date | Aug 18, 2020 |
| Priority date | — |
| Expiry date | Oct 23, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system includes an interface and a controller. The interface is configured to receive a state of a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.