Wireless camera wafer for vacuum chamber diagnostics
US10748798B1 · kind B1 · utility
8Cited by
0References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2019 |
| Grant date | Aug 18, 2020 |
| Priority date | — |
| Expiry date | Jul 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67288
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
In some embodiments, the present disclosure relates to a process tool which includes a housing that defines a vacuum chamber. A wafer chuck is in the housing and a carrier wafer is on the wafer chuck. A camera is integrated on the wafer chuck such that the camera faces a top of the housing. The camera is configured to wirelessly capture images of an object of interest within the housing. Outside of the housing is a wireless receiver. The wireless receiver is configured to receive the images from the camera while the vacuum chamber is sealed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.