Inventor · Taipei, TW

Chii-Ming Wu

105Patents
11h-index
109Co-inventors
83Inventor score

Filing activity: Apr 25, 1997 → Mar 13, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7235482B2 Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology Electricity 509 Expired
US6406956B1 Poly resistor structure for damascene metal gate Electricity 62 Expired
US6803309B2 Method for depositing an adhesion/barrier layer to improve adhesion and contact resistance Electricity 27 Expired
US7223673B2 Method of manufacturing semiconductor device with crack prevention ring Electricity 27 Expired
US7396767B2 Semiconductor structure including silicide regions and method of making same Electricity 24 Expired
US5920081A Structure of a bond pad to prevent testing probe pin contamination Electricity 22 Expired
US10157780B2 Method of forming a device having a doping layer and device formed Electricity 20 Active
US8298925B2 Mechanisms for forming ultra shallow junction Electricity 15 Active
US6410424B1 Process flow to optimize profile of ultra small size photo resist free contact Emerging Cross-Sectional Technologies 15 Expired
US7015126B2 Method of forming silicided gate structure Electricity 12 Expired
US8536658B2 Mechanisms for forming ultra shallow junction Electricity 11 Active
US7268065B2 Methods of manufacturing metal-silicide features Emerging Cross-Sectional Technologies 10 Expired
US6884736B2 Method of forming contact plug on silicide structure Electricity 9 Expired
US9997633B2 Semiconductor devices, FinFET devices and methods of forming the same Electricity 8 Active
US8735266B2 Mechanisms for forming ultra shallow junction Electricity 8 Active
US10748798B1 Wireless camera wafer for vacuum chamber diagnostics Electricity 8 Active
US8354734B2 Semiconductor device with crack prevention ring Electricity 7 Active
US7432559B2 Silicide formation on SiGe Emerging Cross-Sectional Technologies 7 Active
US8791528B2 Methods of manufacturing metal-silicide features Emerging Cross-Sectional Technologies 7 Active
US7078810B2 Semiconductor device and fabrication method thereof Electricity 7 Expired
US9653594B2 Semiconductor device and method for forming the same Electricity 6 Active
US8569139B2 Method of manufacturing strained source/drain structures Electricity 5 Active
US6876027B2 Method of forming a metal-insulator-metal capacitor structure in a copper damascene process sequence Electricity 5 Expired
US9620503B1 Fin field effect transistor and method for fabricating the same Electricity 5 Active
US7279755B2 SRAM cell with improved layout designs Emerging Cross-Sectional Technologies 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.