Anti-reflective gap filling materials and methods
US10755927B2 · kind B2 · utility
1Cited by
88References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2018 |
| Grant date | Aug 25, 2020 |
| Priority date | — |
| Expiry date | Dec 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02118
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In accordance with an embodiment a bottom anti-reflective layer comprises a surface energy modification group which modifies the surface energy of the polymer resin to more closely match a surface energy of an underlying material in order to help fill gaps between structures. The surface energy of the polymer resin may be modified by either using a surface energy modifying group or else by using an inorganic structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.