Patent · US Active

Device for swiveling a mirror element with two degrees of swiveling freedom

US10761317B2 · kind B2 · utility

0Cited by

3References

19Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Hauf · Ulm, DE
Yanko Sarov · Aalen, DE

Key dates

Filing date	Aug 31, 2017
Grant date	Sep 1, 2020
Priority date	—
Expiry date	Aug 31, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH02N1/008
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.