Inventor · Aalen, DE

Yanko Sarov

6Patents
2h-index
21Co-inventors
47Inventor score

Filing activity: Jun 26, 2008 → Mar 29, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10854423B2 Multi-beam particle beam system Electricity 23 Active
US8689359B2 Apparatus and method for investigating surface properties of different materials Physics 2 Active
US10101507B2 Mirror device Physics 1 Active
US10761317B2 Device for swiveling a mirror element with two degrees of swiveling freedom Electricity 0 Active
US11239054B2 Multi-beam particle beam system Electricity 0 Active
US12255040B2 Multi-beam particle beam system and method for operating same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.