Optical arrangement, in particular lithography system, with a transport lock

US10761436B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Ralf Zweering · Aalen, DE
• Steffen Fritzsche · Tholey, DE
• Hendrik Wagner · Bielefeld, DE
• Florian Ahles · Aalen, DE
• Jens Prochnau · Oberkochen, DE
• Michael Erath · Dietenheim, DE
• Viktor Kulitzki · Zwickau, DE
• Marwene Nefzi · Ulm, DE

Key dates

• Filing date: Jul 15, 2019
• Grant date: Sep 1, 2020
• Expiry date: Jul 15, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/709
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical arrangement, for example a lithography system, includes: a first component, in particular a carrying frame; a second component, in particular a mirror, which is movable in relation to the first component; and at least one stop with at least one stop face for limiting the movement of the second component in relation to the first component. The optical arrangement, preferably the stop, can have a fixing device for fixing the second component. The fixing device can have a fixing element that is movable in relation to the stop face of the stop. Further aspects of the device likewise relate to an optical arrangement with a fixing device or with a transport lock.