Vacuum pump
US10767653B2 · kind B2 · utility
0Cited by
1References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2016 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Sep 13, 2037 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2250/51
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a turbo-molecular vacuum pump comprising bearings for supporting the drive shaft and/or the rotor in relation to a pump body, wherein a first bearing is coupled to the rotor and disposed on supporting mount at the high vacuum side of the rotor and radial struts extend from the supporting mount and form an integral part of the body; the invention is characterised in that the radial struts comprise a hinge portion that can flex to allow relative movement of the inlet flange with respect to the supporting mount to reduce distortion effects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.