Reflective diffraction grating and fabrication method

US10768349B2 · kind B2 · utility

Assignee

• Lumentum Operations LLC · US

Inventors

• John Michael Miller · Saline, US
• Hery Djie · San Jose, US
• Patrick Lu · Chandler, US
• Xiaowei Guo · Nanhu, CN
• Qinghong Du · Hercules, US
• Eddie Chiu · Pleasanton, US
• Chester Murley · Ottawa, CA

Key dates

• Filing date: Jun 30, 2017
• Grant date: Sep 8, 2020
• Expiry date: Aug 31, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/001
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A reflective diffraction grating and a fabrication method are provided. The reflective diffraction grating includes a substrate, a UV-absorbing layer, a grating layer having a binary surface-relief pattern formed therein, and a conforming reflective layer. Advantageously, the UV-absorbing layer absorbs light at a UV recording wavelength to minimize reflection thereof by the substrate during holographic patterning at the UV recording wavelength.