Eddie Chiu
10Patents
6h-index
25Co-inventors
66Inventor score
Filing activity: Dec 23, 1997 → Jun 30, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8058181B1 | Method for post-etch cleans | Electricity | 33 | Active |
| US7390755B1 | Methods for post etch cleans | Electricity | 17 | Expired |
| US7160813B1 | Etch back process approach in dual source plasma reactors | Electricity | 15 | Expired |
| US7569492B1 | Method for post-etch cleans | Electricity | 15 | Active |
| US6121154A | Techniques for etching with a photoresist mask | Electricity | 10 | Expired |
| US6955177B1 | Methods for post polysilicon etch photoresist and polymer removal with minimal gate oxide loss | Electricity | 9 | Expired |
| US6146987A | Method for forming a contact plug over an underlying metal line using an etching stop layer | Electricity | 6 | Expired |
| US6459151B1 | Structure and process of via chain for misalignment test | Electricity | 3 | Expired |
| US9720147B2 | Reflective diffraction grating and fabrication method | Physics | 2 | Active |
| US10768349B2 | Reflective diffraction grating and fabrication method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.