Patent · US Active

Semiconductor wafer device and manufacturing method thereof

US10770331B2 · kind B2 · utility

0Cited by
1References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 20, 2018
Grant dateSep 8, 2020
Priority date
Expiry dateAug 20, 2038

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P80/30
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A semiconductor device includes a carrier having a first central axis extending along a first direction and a second central axis extending along a second direction, a plurality of dies disposed on a surface of the carrier, and a plurality of scribing lines separating the plurality of dies from each other. The plurality of scribing lines include a plurality of continuous lines along the first direction and a plurality of discontinuous lines along the second direction, at least one of the plurality of continuous lines overlaps the first central axis, at least one of the plurality of discontinuous lines overlaps the second central axis. The plurality of dies are symmetrically arranged on the carrier about the first central axis and the second central axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.