BEOL thin film resistor
US10770393B2 · kind B2 · utility
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12References
17Claims
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Assignee
Inventors
Key dates
| Filing date | Mar 20, 2018 |
| Grant date | Sep 8, 2020 |
| Priority date | — |
| Expiry date | Mar 20, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Back end of the line precision resistors that allow for high currents and for configuration as an eFuse by embedding a single thin film high resistive metal material within a dielectric layer, wherein the resisters are coupled to sidewalls of adjacent metal interconnects are described. The resistors can be formed in the metal one (M1) dielectric layer and can be coupled to sidewalls of the M1 interconnects. Also described are processes for fabricating integrated circuits including the resistors and/or e-Fuses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.