Transmission electron microscope micro-grid and method for making the same
US10777378B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Jan 20, 2019 |
| Grant date | Sep 15, 2020 |
| Priority date | — |
| Expiry date | Jan 20, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/285
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a transmission electron microscope (TEM) micro-grid and a method for preparing the TEM micro-grid. The TEM micro-grid comprises a porous silicon nitride substrate and a graphene layer located on a surface of the porous silicon nitride substrate. The porous silicon nitride substrate comprises a plurality of through holes. The graphene layer covers the plurality of through holes. The method for preparing the TEM micro-grid provided in the present disclosure uses a carbon nanotube film structure to transfer a graphene layer to a surface of a porous silicon nitride substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.