Composition for surface treatment and method for surface treatment using the same
US10781410B2 · kind B2 · utility
1Cited by
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10Claims
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Key dates
| Filing date | Sep 11, 2018 |
| Grant date | Sep 22, 2020 |
| Priority date | — |
| Expiry date | Jan 31, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/22
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The composition for surface treatment according to the present invention includes a carboxylic acid compound having two or more nitrogen atoms, an ionic dispersing agent, and water, has a pH of less than 6, and is used for treating a surface of a polished object having a tungsten-containing layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.