Method for producing a bolometric detector

US10797103B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Patrick Leduc · Grenoble, FR
• Sébastien Cortial · Hameau du Château, FR
• Stephane Pocas · Grenoble, FR
• Jean-Jacques Yon · Saint-Égrève, FR

Key dates

• Filing date: May 2, 2018
• Grant date: Oct 6, 2020
• Expiry date: May 2, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N15/15
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for producing a bolometric detector comprising producing a stack, on an interconnect level of a read-out circuit, comprising a sacrificial layer positioned between a carrier layer and an etch stop layer, the sacrificial layer comprising a mineral material; producing a conducting via passing through the stack such that it is in contact with a conducting portion of said interconnect level; depositing a conducting layer onto the carrier layer and the via; etching the conducting layer and the carrier layer, forming a bolometer membrane electrically connected to the via by a remaining portion of the conducting layer that covers an upper part of the via; and elimination of the sacrificial layer by selective chemical etching, and such that the membrane is suspended by the via.