Preparation of Si-H containing iodosilanes via halide exchange reaction

US10800661B2 · kind B2 · utility

Assignee

• L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

• Cole J. Ritter, III · Easton, US
• Gennadiy Itov · Flemington, US
• Manish Khandelwal · Danbury, US
• Jean-Marc Girard · Versailles, FR
• Glenn Kuchenbeiser · Newark, US
• Sean Kerrigan · Champaign, US
• Peng Zhang · Montvale, US
• Larry Kit-wing Leung · Annandale, US
• Nicolas Blasco · Grenoble, FR

Key dates

• Filing date: Jul 2, 2019
• Grant date: Oct 13, 2020
• Expiry date: Jul 2, 2039

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45525
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Methods of synthesizing Si—H containing iodosilanes, such as diiodosilane or pentaiododisilane, using a halide exchange reaction are disclosed.