Inventor · Newark, DE, US

Glenn Kuchenbeiser

16Patents
3h-index
24Co-inventors
52Inventor score

Filing activity: Jul 12, 2013 → Mar 11, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US9371338B2 Organosilane precursors for ALD/CVD silicon-containing film applications Electricity 20 Active
US9382268B1 Sulfur containing organosilane precursors for ALD/CVD silicon-containing film applications Chemistry; Metallurgy 11 Active
US9701695B1 Synthesis methods for amino(halo)silanes Chemistry; Metallurgy 5 Active
US10384944B2 Preparation of Si—H containing iodosilanes via halide exchange reaction Chemistry; Metallurgy 3 Active
US10647578B2 N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications Electricity 1 Active
US9777373B2 Amino(iodo)silane precursors for ALD/CVD silicon-containing film applications and methods of using the same Electricity 1 Active
US9064694B2 Nitridation of atomic layer deposited high-k dielectrics using trisilylamine Electricity 1 Active
US9822132B2 Hexacoordinate silicon-containing precursors for ALD/CVD silicon-containing film applications Chemistry; Metallurgy 1 Active
US10006122B2 Organodisilane precursors for ALD/CVD silicon-containing film applications Chemistry; Metallurgy 0 Active
US9938303B2 Organosilane precursors for ALD/CVD silicon-containing film applications Electricity 0 Active
US10053775B2 Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications Chemistry; Metallurgy 0 Active
US10570513B2 Organosilane precursors for ALD/CVD silicon-containing film applications and methods of using the same Chemistry; Metallurgy 0 Active
US9593133B2 Organosilane precursors for ALD/CVD silicon-containing film applications Electricity 0 Active
US11203528B2 N—H free and Si-rich per-hydridopolysilzane compositions, their synthesis, and applications Electricity 0 Active
US11739220B2 Perhydropolysilazane compositions and methods for forming oxide films using same Chemistry; Metallurgy 0 Active
US10800661B2 Preparation of Si-H containing iodosilanes via halide exchange reaction Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.