Sensor chip, flexure element, and force sensor device
US10801904B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2017 |
| Grant date | Oct 13, 2020 |
| Priority date | — |
| Expiry date | Nov 1, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/162
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor chip includes first support parts arranged at four corners and a second support part arranged at a center of a substrate, first detecting beams connecting adjacent first support parts to each other, second detecting beams provided in parallel to the first detecting beams between the first and second support parts, third detecting beams connecting the first and second connecting beams, in sets of the first and second detecting beams provided in parallel, force application points, arranged at intersections of the first and third detecting beams, and applied with the forces, and a plurality of distortion detection devices arranged at predetermined positions on the first, the second and the third detecting beams.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.