Probe systems and methods for calibrating capacitive height sensing measurements
US10809048B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 30, 2019 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Dec 30, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/085
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Probe systems and methods for calibrating capacitive height sensing measurements. A probe system includes a probe assembly with a probe support body that supports a capacitive displacement sensor that terminates in a sensing tip relative to a substrate and that is configured to generate an uncalibrated capacitive height measurement. A method of utilizing the probe system to generate a calibrated capacitive height measurement includes receiving a height calibration structure architecture; calculating a layer impedance magnitude of each substrate layer of the height calibration structure; and calculating a total layer impedance magnitude of the height calibration structure. The method further includes measuring a measured impedance magnitude and calculating the calibrated capacitive height measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.