Substrate transfer apparatus and control method thereof
US10811294B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2017 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Jun 6, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided are a substrate transfer apparatus and a control method thereof. The substrate transfer apparatus includes a body having a gate through which a substrate passes; a substrate transfer robot provided inside the body and including an end effector that includes a first seating portion and a second seating portion horizontally spaced apart from each other; a sensing portion including a light emitting portion and a light receiving portion spaced apart from each other in a diagonal direction with respect to a longitudinal direction of the first and second seating portions with reference to the end effector, and detecting the position of at least one of the first seating portion and the second seating portion when the end effector moves; and a control unit for determining whether the end effector is misaligned or sagged by using a measured value measured by the sensing portion and a predetermined reference value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.