Patent assignee · KR · COMPANY

WONIK IPS CO., LTD.

36Patents
36Active
36Granted
55Portfolio score

Filing activity: Jun 28, 2007 → Oct 12, 2023 · 3 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US9732424B2 Gas injection apparatus and substrate processing apparatus using same Electricity 11 Active
US9464353B2 Substrate processing apparatus Chemistry; Metallurgy 5 Active
US8741160B2 Method for manufacturing solar cell and solar cell manufactured by the same method Emerging Cross-Sectional Technologies 2 Active
US8673676B2 Surface processing method of silicon substrate for solar cell, and manufacturing method of solar cell Emerging Cross-Sectional Technologies 1 Active
US9506146B2 Thin film vapor deposition method and thin film vapor deposition apparatus Chemistry; Metallurgy 0 Active
US10699900B2 Method for forming thin film Electricity 0 Active
US11482452B2 Method of forming a contact plug in a semiconductor integrated circuit device Electricity 0 Active
US10811294B2 Substrate transfer apparatus and control method thereof Electricity 0 Active
US11292023B2 Substrate processing apparatus Electricity 0 Active
US12024777B2 Method of processing substrate Electricity 0 Active
US10662528B2 Substrate processing apparatus and substrate processing method using the same Electricity 0 Active
US11823907B2 Processing method for substrate Electricity 0 Active
US11769681B2 Transfer robot and substrate processing apparatus having the same Electricity 0 Active
US10752993B2 Substrate processing apparatus and substrate processing method Electricity 0 Active
US11967503B2 Method of depositing thin film and method of manufacturing semiconductor device using the same Electricity 0 Active
US9793476B2 Apparatus and method for treating a substrate Electricity 0 Active
US10985015B2 Method for preparing composite membrane Electricity 0 Active
US12371783B2 Internal chamber processing method and substrate processing method Electricity 0 Active
US10381217B2 Method of depositing a thin film Electricity 0 Active
US9269568B2 Method of manufacturing semiconductor device using the same Electricity 0 Active
US11875998B2 Substrate processing method Electricity 0 Active
US11651960B2 Method for forming amorphous silicon thin film, method for manufacturing semiconductor device including same, and semiconductor manufactured thereby Electricity 0 Active
US10418589B2 Substrate processing method Electricity 0 Active
US12377483B2 Method of assembling substrate supporting apparatus Electricity 0 Active
US12249536B2 Substrate supporting assembly and substrate processing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.