Gimbal for CMP tool conditioning disk having flexible metal diaphragm
US10814457B2 · kind B2 · utility
1Cited by
14References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Jan 22, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B53/017
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A gimbal for a conditioning system for a CMP tool is configured to maintain a conditioning disk in contact with a polishing pad of the CMP tool. The gimbal includes an arm coupling for coupling to a conditioning swing arm of the CMP tool; and a disk holder for holding the conditioning disk. A flexible diaphragm extends between the arm coupling and the disk holder. The flexible diaphragm allows the disk holder to flex relative to the arm coupling. The flexible diaphragm is made of a metal or metal alloy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.