Patent · US Active

Using stochastic failure metrics in semiconductor manufacturing

US10818001B2 · kind B2 · utility

6Cited by

1References

20Claims

0Family size

Assignee

KLA-TENCOR CORPORATION · US

Inventors

Wing-Shan Ribi Leung · Sunnyvale, US
Kaushik Sah · Milpitas, US
Allen Park · Cambridge, US
Andrew Cross · Hale, GB

Key dates

Filing date	Jan 7, 2019
Grant date	Oct 27, 2020
Priority date	—
Expiry date	Jan 7, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/12
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A stochastic calculation engine receives inputs from a semiconductor inspection tool or semiconductor review tool. The stochastic calculation engine determines abnormal locations and pattern variation from the inputs and determines stochastic failures from the inputs. An electronic data storage unit connected with the stochastic calculation engine can include a database with known stochastic behavior and known process metrology variations. The stochastic calculation engine can flag stochastic features, determine a failure rate, or determine fail probability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.