Inventor · Hale, GB

Andrew Cross

10Patents
2h-index
14Co-inventors
43Inventor score

Filing activity: Oct 11, 2016 → Apr 26, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US10818001B2 Using stochastic failure metrics in semiconductor manufacturing Electricity 6 Active
US10699926B2 Identifying nuisances and defects of interest in defects detected on a wafer Physics 4 Active
US10262408B2 System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor wafer Physics 2 Active
US10262831B2 Method and system for weak pattern quantification Electricity 1 Active
US10957608B2 Guided scanning electron microscopy metrology based on wafer topography Electricity 0 Active
US10068323B2 Aware system, method and computer program product for detecting overlay-related defects in multi-patterned fabricated devices Electricity 0 Active
US12066763B2 Sensitivity improvement of optical and SEM defection inspection Electricity 0 Active
US12235224B2 Process window qualification modulation layouts Physics 0 Active
US11092893B2 Inspection sensitivity improvements for optical and electron beam inspection Physics 0 Active
US10598617B2 Metrology guided inspection sample shaping of optical inspection results Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.