Active matrix substrate and liquid crystal display panel
US10818766B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2018 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Mar 23, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D99/00
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An active matrix substrate according to an embodiment of the present invention includes a plurality of thin film transistors supported on a substrate and an inorganic insulating layer covering the plurality of thin film transistors. Each thin film transistor includes a gate electrode, an oxide semiconductor layer, a gate insulating layer, a source electrode, and a drain electrode. At least one of the gate insulating layer and the inorganic insulating layer is an insulating layer stack having a multilayer structure including a silicon oxide layer and a silicon nitride layer. The insulating layer stack further includes an intermediate layer disposed between the silicon oxide layer and the silicon nitride layer, the intermediate layer having a refractive index nC higher than a refractive index nA of the silicon oxide layer and lower than a refractive index nB of the silicon nitride layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.