Inventor · Hachioji, JP

Tetsuo Kikuchi

157Patents
13h-index
122Co-inventors
89Inventor score

Filing activity: Oct 14, 1986 → May 18, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US4769750A Illumination optical system Physics 96 Expired
US4939630A Illumination optical apparatus Physics 87 Expired
US5581075A Multi-beam scanning projection exposure apparatus and method with beam monitoring and control for uniform exposure of large area Physics 39 Expired
US6385289B1 X-ray diffraction apparatus and method for measuring X-ray rocking curves Physics 31 Expired
US8581257B2 Circuit board and display device Physics 28 Active
US5617181A Exposure apparatus and exposure method Physics 27 Expired
US6148243A Sound Processing method and system Electricity 26 Expired
US5661837A Illumination optical apparatus and scanning exposure apparatus using the same Emerging Cross-Sectional Technologies 21 Expired
US6459763B1 Combinatorial X-ray diffractor Performing Operations; Transporting 21 Expired
US6663238B2 Lamination apparatus and recording apparatus Performing Operations; Transporting 18 Expired
US7158609B2 X-ray crystal orientation measuring method and X-ray crystal orientation measuring apparatus Physics 18 Expired
US9293594B2 Circuit board and display device Physics 15 Active
US6717651B2 Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice Physics 13 Expired
US6002587A Housing of information processing apparatus Electricity 13 Expired
US8531224B2 Shift register, scanning signal line drive circuit provided with same, and display device Physics 12 Active
US9335282B2 X-ray topography apparatus Physics 12 Active
US6574306B2 Channel-cut monochromator Physics 12 Expired
US7104216B2 Coating liquid application apparatus for ink-printed medium and image printing apparatus having same Emerging Cross-Sectional Technologies 11 Expired
US6970532B2 Method and apparatus for measuring thin film, and thin film deposition system Physics 10 Expired
US7234800B2 Inkjet recording apparatus Performing Operations; Transporting 10 Expired
US6072854A Method and apparatus for X-ray topography of single crystal ingot Physics 9 Expired
US5132809A Image display apparatus Electricity 8 Expired
US9580268B2 Article receiving device Performing Operations; Transporting 8 Active
US5594587A Illumination device with allowable error amount of telecentricity on the surface of the object to be illuminated and exposure apparatus using the same Physics 8 Expired
US9434189B2 Mounted apparatus and system Performing Operations; Transporting 8 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.